Shaft length (LTotal)
6 mm
Number of shafts (NShaft)
2
Shaft pitch (PShaft)
200 µm
Shaft width (WShaft)
123 µm
Number of electrodes (NEl)
64
Electrode Pitch (PEl)
100 µm
Electrode Length (LEl)
3100 µm
Electrode size (DEl), material (EM), probe thickness (T)
25 µm IrOx, 50 µm
Size of the optional, internal reference electrode
