Shaft length (LTotal)
6 mm
Number of shafts (NShaft)
4
Shaft pitch (PShaft)
200 µm
Shaft width (WShaft)
75 µm
Number of electrodes (NEl)
64
Electrode Pitch (PEl)
50 µm
Electrode Length (LEl)
700 µm
Electrode size (DEl), material (EM), probe thickness (T)
25 µm IrOx, 50 µm
Size of the optional, internal reference electrode