Shaft length (LTotal)
20 mm
Number of shafts (NShaft)
1
Shaft width (WShaft)
92 µm
Number of electrodes (NEl)
16
Electrode Pitch (PEl)
60 µm
Electrode Length (LEl)
900 µm
Electrode size (DEl), material (EM), probe thickness (T)
15 × 15 µm IrOx, 50 µm
Size of the optional, internal reference electrode
