Shaft length (LTotal)
10 mm
Number of shafts (NShaft)
4
Shaft pitch (PShaft)
200 µm
Shaft width (WShaft)
40 µm
Number of electrodes (NEl)
16 (4 × 4)
Electrode Pitch (PEl)
50 µm
Electrode Length (LEl)
150 µm
Electrode size (DEl), material (EM), probe thickness (T)
Ø 25 µm, Pt, 100 µm
Size of the optional, internal reference electrode
